Download Industrial Ion Sources: Broadbeam Gridless Ion Source by Viacheslav V. Zhurin PDF
By Viacheslav V. Zhurin
As a result huge variety of makes use of of ion resources in academia and undefined, those that make the most of those assets want brand new and coherent details to maintain themselves abreast of advancements and techniques, and to selected perfect strategies for caliber and cost-effectiveness. This publication, written by way of an writer with a powerful business history and ideal status, is the excellent consultant clients and builders of ion assets were looking forward to. offering a radical refresher at the physics concerned, this source systematically covers the resource forms, elements, and the operational parameters.Content:
Chapter 1 Hall?Current Ion assets (pages 1–27):
Chapter 2 Ion resource and Vacuum Chamber. impression of assorted results on Ion Beam Parameters (pages 29–51):
Chapter three Oscillations and Instabilities in Hall?Current Ion assets (pages 53–65):
Chapter four optimal Operation of Hall?Current Ion resources (pages 67–83):
Chapter five Cathode Neutralizers for Ion resources (pages 85–147):
Chapter 6 business Gridless Broad?Beam Ion resource manufacturers, difficulties and the necessity for his or her Standardization (pages 149–196):
Chapter 7 Operation of business Ion resources with Reactive Gases (pages 197–208):
Chapter eight Ion Beam and Radiation effect on Substrate Heating (pages 209–222):
Chapter nine Ion Beam power and present (pages 223–240):
Chapter 10 Plasma Optical structures (pages 241–254):
Chapter eleven Ion and Plasma assets for technology and expertise (pages 255–267):
Chapter 12 Ion support, and its diverse functions (pages 269–286):
Chapter thirteen Magnetron with Non?Equipotential Cathode (pages 287–307):
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Additional info for Industrial Ion Sources: Broadbeam Gridless Ion Source Technology
Sample text
And 4 Knapp, B. and Finke, S. B. (1989) Stationary Plasma Thrusters. Kharkov Aviation Institute (in Russian). S. (1999) Physics of closed drift thrusters. Plasma Sources Sci. , 8, R1–R20. , and Thear, E. (1999) The Evolution of IonBeam Diamond Like-Carbon Technology into Data Storage: Space Propulsion, Sunglasses, Slides, and New Disks, DataTech Magazine, 2nd edn, pp. 69–77. beam chemical vapor deposition of SiO2like materials using a closed-drift ion source. Society of Vacuum Coaters, 46th Annual Technical Conference Proceedings.
The ion current density, decreasing due to the charge-exchange reaction at the point z from the ion source exit plane, is expressed by a simple formula [4]: I ¼ Io expðÀnszÞ ð2:8Þ where Io is the ion current density at the ion source exit plane. 8 as I ¼ Io expðÀ3:3  1016 psr zÞ ð2:10Þ After utilizing the resonant charge-exchange cross section, it is easy to obtain the figures of the relative attenuation of an ion beam current. 2 presents the curves for the attenuation of the ratio of the ion beam current at a certain point from the ion source to the ion beam current, coming from the ion source exit plane as a function of distance from an ion source exit plane for several background pressures; working gas xenon with the background temperature at 293 K; ion beam mean energy is 200 eV [1].
Russ. J. ) and Exp. Techniques (5), 103. Sainty, W. (November 11 2003) Ion Source, US Patent 6,645,301. V. (March 11 2008) Fluid-Cooled Ion Source, US Patent No. 7,342,236. V. (November 2009) Industrial Gridless Broad Beam Ion Sources and the Need for Their Standardization. Part 4B. Hall-Current Ion Sources, Problems and Solutions. Standardization of Ion Sources, Vacuum Technology & Coating, pp. 40–49. Klyuev, V. (October 2009) Private Communication. V. (June 15 2004) HallCurrent Ion Source, US Patent 6,750,600.