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By James F. Ziegler
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Example text
There are conflicting histories as to who made the suggestion that they look for backscattered particles - but the subsequent startling data reversed the current thought on atomic structure. They reported that about . 0 1 % of the heavy alpha-particles were scattered back from the target, and from an analysis of the data statistics such backscattered events had to be from isolated single collisions. Two years later Rutherford was able to demonstrate theoretically (11a) that the backscattering was indeed due to a single event, and by analyzing this and electron scattering data he was able to first calculate that the nucleus of Al atoms must have a charge of about 22 and about 138 for platinum!
Shows an Accelerators wafer chamber made in 1971 for six 2 inch wafers. Today target chambers contain up to 25 four or five inch wafers and measure well over 1 m in diameter. Examples are the Varian - Extrion disk with 25 four inch wafers shown in Fig. 48 and the Balzers carousel with 52 three inch wafers shown in Fig. 49. But 6 and 8 inch wafer are right around the corner and ion implantation equipment will always follow the demands of the users. THE HISTORICAL DEVELOPMENT OF ION IMPLANTATION 41 Fig.
Target chamber of an early Accelerators Implanter at the Centre Electronique Horloger, Neuchâtel, Switzerland (H. Luginbühl). Fig. 48. Target disk of the Varian-Extrion 80-10, 1980. shows an Accelerators wafer chamber made in 1971 for six 2 inch wafers. Today target chambers contain up to 25 four or five inch wafers and measure well over 1 m in diameter. Examples are the Varian - Extrion disk with 25 four inch wafers shown in Fig. 48 and the Balzers carousel with 52 three inch wafers shown in Fig.