Download Low Energy Ion Assisted Film Growth by A. R. Gonzlez-Elipe;F. Yubero;Jose M. Serrano Sanz PDF
By A. R. Gonzlez-Elipe;F. Yubero;Jose M. Serrano Sanz
This booklet is an introductory handbook for Ion Assisted Deposition (IAD) methods of skinny motion pictures. it truly is addressed to researchers, post-graduates or even engineers with very little adventure within the suggestions of skinny movie deposition. It experiences the fundamental strategies concerning the interplay of low power ion beams with fabrics. the most methods used for IAD synthesis of skinny motion pictures and the most results of ion beam bombardment on growing to be movies, reminiscent of densification, tension, blending, floor knocking down and adjustments in texture are severely mentioned. an outline of a few of the functions of IAD tools and a evaluate of the synthesis by way of IAD of diamond-like carbon and cubic-boron nitride whole the ebook.
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Extra info for Low Energy Ion Assisted Film Growth
Example text
P. , /. Vac. Sci. Technol. A 8 (1990) 821. , Okumura, M. , Surf. Coat. Technol. 128/129 (2000) 274. , Sigmund, P. , Spatial Distribution of Energy Deposited by Atomic Particles in Elastic Collisions, in Mat. Fys. Medd. Dan. Vid. Selsk. 37 n°14 (1970). P. , The Stopping and Range of Ions in Solids (Pergamon Press, New York, 1985). CHAPTER 2 ION ASSISTED METHODS OF PREPARATION OF THIN FILMS In practice, the preparation of thin films by methods involving the assistance of the film growth with accelerated ion species can be carried out using several experimental approaches.
1 nm, respectively. , ,,,l —, s •. I I I i-TTiri r-1 i i i i ii 10- 10- s/ ii ,—,—,,1—T j/gjyX? 13. Comparison of the projected ranges calculated according to the power law approximations (solid lines) and TRIM simulations (symbols) for several ion —» target systems. Until now, we have always dealt with monoatomic target materials. In the case of IAD growth of compounds as oxides, nitrides or carbides this is not the case. 26) where x + y - 1, Rp(A), Rp(B), NA, and NB are the projected ranges and the atomic densities in pure A and B targets respectively, and AT the atomic density of the compound.
The stopping cross sections are usually expressed as a function of the reduced energy introduced in Eq. 9). 16) This reduced notation enables an easy comparison between collisions with different energy regimes and also to compare electronic and nuclear losses. In the following we will introduce expressions to evaluate stopping powers and stopping cross sections. They will allow us to estimate analytically different magnitudes of interest in IAD processes. 1. , the probability for a particular energy loss E2 to take place (in the following we use T = E2 for clarity).