Download Optical scattering : measurement and analysis by John C. Stover PDF
By John C. Stover
Because the authoritative source on optical scattering, this e-book used to be built from a long time of educating light-scatter size and research classes to optical engineers. Dr. Stover covers scattering starting with its fundamentals and protecting floor roughness calculations, measurements, instrumentation, predictions, requisites, and business functions. additionally integrated are appendices that evaluation the fundamentals of wave propagation and Kirchhoff diffraction. even if you are an optical engineer presently investigating roughness-induced haze within the semiconductor undefined, or simply getting into the sector of scatter metrology, this article is going to be necessary.
Contents:
- creation to gentle Scatter
- floor Roughness
- Scatter Calculations and Diffraction Theory
- Calculation of Smooth-Surface records from the BRDF
- Polarization of Scattered Light
- Scatter Measurements and Instrumentation
- Scatter Predictions
- Detection of Discrete floor and Subsurface Defects
- business Applications
- Scatter Specifications
- evaluation of Electromagnetic Wave Propogation
- Kirchhoff Diffraction from Sinusoidal Gratings
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Sample text
The dangers of assigning numerical values to surface-roughness parameters, without also revealing the corresponding spatial frequency bandwidths, have been alluded to in Chapter 1 and will be further discussed in Chapter 4; however, it is reasonable to consider a few numbers to put the surfaces in question into proper perspective. For optics and polished semiconductor wafers, the calculated (or measured) values of rms surface roughness do not generally exceed an upper limit of about 100 A. A lower limit of about 1 A, which is being approached in practice, is imposed by atomic dimensions.
Except for a few special cases, analytical solutions do not exist that completely describe the scatter pattern in terms of an input beam and the scattering element. A reasonably accurate description for scatter from a sinusoidal grating can be used to gain insight into the general principles that govern scatter distributions generated by reflective surfaces. Grating frequency determines the angular position of scatter components, while grating amplitude and frequency determine scattered power. Considering reflectors of arbitrary surface topography to be composed of a summation of sinusoidal gratings (a Fourier spectrum) will allow these results to be applied to more practical situations involving clean, smooth reflectors.
They are mathematically equivalent), the PSD can be more accurately obtained from profile data because it is much easier to correct for instrumental and sampling effects that unavoidably appear in real measurement situations. It will be seen in later chapters that a similar situation is true for surface statistics found from scatter measurements—the PSD is the better choice. Nevertheless, because the autocovariance function approach has been used for several years and because considerable insight can be gained by studying both approaches, it is worthwhile to also define this function and its relationship to the power spectrum, and indicate the methods of obtaining each of these functions from profile data.